Hexo Industries (M) Sdn Bhd
1-2-9, i-Avenue, Medan Kampung Relau 1, 11900 Bayan Lepas, Penang, Malaysia.
+6011-6528 1088
+604-611 1186
+6012-954 1088
+6012-558 2052
  +60129541088

Indonesia Branch
Jababeka Bizpark, Blok D/16, Jababeka Innovation Center, Pintu 6, Blok D/16, Cikarang, Bekasi, Jawa Barat 60292, Indonesia.

Singapore Branch
SpectrumSense Solutions
1 Scotts Road, #24-10 Shaw Centre, Singapore 228208.

Agilent / Varian Turbo-V 2K-G

Previous 17 / 39 Next

Agilent / Varian Turbo-V 2K-G Agilent / Varian Turbo Pumps Vacuum Products


Turbo Pumps

Turbo-V 2K-G

 

The Agilent high throughput turbomolecular pump, Turbo-V 2K-G, is a dedicated vacuum pumping system, designed specifically as a turbo pump for thin film deposition equipment. Its pumping stages, and the entire pump structure, are optimized to work with very high flows of Argon under high temperature load.

This robust turbo pump is suitable for harsh manufacturing environments because of its rugged design. Typical industrial vacuum coating applications include physical vapor deposition (PVD), solar and flat panel display manufacturing.

The pump's robust design and its advanced electronics, rack type or onboard solution, make the Agilent Turbo-V 2K-G the optimum pumping solution for the vacuum coating industry.


Order Information

Turbo Pump, Accessories and Spare Parts


Description Part number
Turbo-V 2K-G system 9698871
Turbo 2K-G with ProfiBus 9698873
Mains cable NEMA Plug, 3m long 9699958
Mains cable European Plug, 3m long 9699957
Serial cable and A-PLUS Software 9699883
Protocol Converter RS-232 <-> RS-485 wire 9699258
Inlet screen ISO 250 with center ring viton 9699138
Water cooling kit for 6x8 (IDxOD) flexible tube (plastic model) 9699348
Water cooling kit for 3/8 in. ID flexible tube (metallic model) 9699338
IP-54 Accessory kit – Type 1 9698960
Turbo-V Remote Panel 9698850
Exchange Turbo-V 2K-G system EX9698871
Exchange Turbo 2K-G with ProfiBus EX9698873


Features

The first application-specific pumping solution designed for thin film deposition equipment
The highest performing, most compact unit available
The first fully integrated approach for maximum system productivity and uptime
Integrated package includes Turbo Molecular Pump, Drive Electronics, Power Supply, MoniTorr, Purge Gas and Communication
Versatile electronics interface with easy to use control Software Analog I/O signals and RS232 / RS485 interface as standard
Agilent Profibus interface (optional)

Specifications

Technical Specifications

Pumping speed:
N2: 1600 l/s
 
Compression ratio: N2: 3 x 105  
Base pressure* (with recommended forepump) <1 x 10-8 mbar  
Inlet flange ISO 250F  
Foreline flange KF 40 NW  
Nominal rotational speed 33,000 rpm  
Start-up time <7 minutes  
Recommended forepump > 40 m3 /h  
Operating position Any  
Operating ambient temperature +5 °C to +40 °C  
Power supply
Input voltage
Input freq.
100 - 240 Vac
50 - 60 Hz
 
Communication interface Analogue I/O
RS232 / RS485
Profibus
Standard
Standard
Optional
Dimensions
Height
Weight
Diameter
335 mm (13.18 in.)
335 mm (13.18 in.)
35 kg (77 lbs)
* According to standard DIN 28 428.

Literature

Vacuum Tools for Coating System Productivity

Detailing how Agilent's vacuum products, systems and services can enhance large area vacuum coating system performance and uptime.

Vacuum and Leak Detection training

Catalog of Vacuum, Leak Detection and equipment operation & maintenance courses to suit every customer’s need including On-Request and On-Site training programs.

A-PLUS software release 2.0.2

A-PLUS software (formerly T-plus) - release 2.0.2 - communication, control and monitoring software designed to leverage the intelligence of Agilent vacuum products. 2 versions: 32-bit and 64-bit versions of Windows.

Support
FAQs
User Manuals

Turbo-V 2K-G Pumping System

Instructions for use and technical specifications for the Turbo-V 2K-G


 
Please leave your enquiry here, we will reply as soon as possible.
Name*  
Company Name  
Product Interested  
Quantity  
Email*  
Contact No.*  
Attachment  
*only support gif, jpeg, jpg, png, pdf
Messages*  


Switch to Mobile Version
Subscribe Newsletter