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Agilent / Varian Turbo-V 3K-G

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Agilent / Varian Turbo-V 3K-G Agilent / Varian Turbo Pumps Vacuum Products


Turbo Pumps
Turbo-V 3K-G


The Agilent high throughput turbomolecular pump, Turbo-V 3K-G, is a dedicated vacuum pumping system, designed specifically as a turbo pump for thin film deposition equipment. Its pumping stages, and the entire pump structure, are optimized to work with very high flows of Argon under high temperature load.

This robust turbo pump is suitable for harsh manufacturing environments because of its rugged design. Typical industrial vacuum coating applications include physical vapor deposition (PVD), solar and flat panel display manufacturing.

The pump's robust design and its advanced integrated electronics make the Agilent Turbo-V 3K-G the optimum pumping solution for the vacuum coating industry.

Features

  • The only truly ''integrated'' system on the market
  • Highest pumping speeds in its class
  • Oil-free, robust and reliable
  • MTTF of more than 200,000 hours
  • Leading edge rotor design provides significant reduction in weight and mechanical stress
  • Patented rotor-shaft fitting eliminates rotor tensile stress
  • Utilizes Agilent's A-PLUS software (formerly T-plus)
  • Typical Turbo Pump Applications
Specifications

Technical Specifications
Pumping speed:
N2: 2200 l/s
 
 
He: 1900 l/s
 
 
Ar: 2050 l/s
 
 
 
 
 
Compression ratio:
N2: > 1 x 107
He: 6 x 103
Ar: > 1 x 108
 
Base pressure* (with recommended forepump)
<1 x 10-8 mbar
 
 
 
Inlet flange
ISO 250F
 
 
 
Foreline flange
KF 40 NW
 
 
 
Nominal rotational speed
31,800 rpm
 
 
 
Start-up time without gas load and with the recommended forepump
<6 minutes
 
 
 
Foreline pressure
< 0.5 mbar
 
 
 
Minimum Recommended forepump
> 60 m3/h (depending on gasflow requirements)
 
 
 
Operating position
Any
 
 
 
Cooling requirements
Water
 
 
 
Weight ISO (250)
52 kg (114.63 lbs)
 
 
 
* According to standard DIN 28 428.


Order Information

Turbo Pump, Accessories and Spare Parts


Description Part number
Turbo-V 3K-G ISO 250 F system with integrated purge/vent valves 9698888
Turbo-V 3K-G T ISO 250 F with ProfiBus and integrated purge/vent valves 9698889
Mains cable NEMA Plug, 3m long 9699958
Mains cable European Plug, 3m long 9699957
Serial cable and A-PLUS Software 9699883
Inlet screen DIN ISO 250 9699350
Protocol Converter RS-232 <-> RS-485 wire 9699258
Centering ISO 250 9699144
Water cooling kit for 6x8 (IDxOD) flexible tube (plastic model) 9699348
Water cooling kit for 3/8 in. ID flexible tube (metallic model) 9699338
Turbo-V Remote Panel 9698850
IP-54 accessory kit – Type 1 9698960

Exchange Turbo-V 3K-G ISO 250 F system with integrated purge/vent valves EX9698888
Exchange Turbo-V 3K-G T ISO 250 F with ProfiBus and integrated purge/vent valves EX9698889


Literature

Vacuum Tools for Coating System Productivity

Detailing how Agilent's vacuum products, systems and services can enhance large area vacuum coating system performance and uptime.

Turbo-V 3K-G System

Turbo-V 3K-G System Brochure

Vacuum and Leak Detection training

Catalog of Vacuum, Leak Detection and equipment operation & maintenance courses to suit every customer’s need including On-Request and On-Site training programs.

Software

A-PLUS software release 2.0.2

A-PLUS software (formerly T-plus) - release 2.0.2 - communication, control and monitoring software designed to leverage the intelligence of Agilent vacuum products. 2 versions: 32-bit and 64-bit versions of Windows.


Support
FAQs
User Manuals

Turbo-V 3K-G Pumping System user manual

Instructions for use and technical specifications for the Turbo-V 3K-G Pumping System


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