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+604-611 1186
+6012-558 2052, +6012-954 1088

Agilent MS Series Rotary Vane Pumps

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Agilent MS Series Rotary Vane Pumps Rotary Vane Pumps Primary / Medium Vacuum Pumps

Agilent MS Series high capacity, single stage, oil-lubricated rotary vane pumps are powerful, compact and environmentally-friendly alternatives to larger industrial pumps with similar speeds. The flexible MS Series features robust and reliable components, high pumping speed at low pressure, low noise and easy installation. Our reliable pumps are often used in combination with Turbomolecular or Diffusion HV pumps in a wide range of industry applications including metallurgy, heat treatment, vacuum coating, electron beam welding (EBW), Helium leak detection and liquefied natural gas (LNG) transportation.


MS Series Rotary Vane Pumps Pumping Speed Description Features Specifications
MS-101 60 Hz: 109 m3/hour, 64 cfm
50 Hz: 95 m3/hour, 56 cfm
Discover Agilent’s compact MS-101 rotary vane pump, delivering stable industrial performance with low noise.
  • Powerful and efficient industrial performance and stability for a wide range of applications
  • Environmentally friendly and cost-effective due to reduced power requirements
  • Highly efficient oil circulation system ensures excellent lubrication and sealing in all critical areas
  • Cover design optimizes cooling air channels
  • Floating valve for better oil recovery and integrated heat exchanger carries away excess heat
  • Robust, high quality components and fittings ensure superb sealing
Outline Drawing

MS-101 Outline Drawing

Technical Specifications

MS-101 Technical Specifications

Pumping Speed Curve

MS-101 Speed Curve

Ordering Details

MS-101 Ordering Details

MS-301 60 Hz: 290 m3/hour, 170 cfm
50 Hz: 250 m3/hour, 150 cfm
  • High pumping speed, even at low pressures, and smooth performance across the entire operating pressure range due to shorter cycle times
  • Excellent industrial performance in applications ranging from manufacturing and cryogenics to process technology and pharmaceutical uses
  • Low operating ultimate partial pressure of ≤ 8 x 10-2 mbar (≤ 6 x 10-2 Torr) with gas ballast close1d
  • Environmentally-friendly demister system and floating valve for enhanced oil management
  • Optimized cooling design with air channels and integrated heat exchanger
  • Reliable and efficient oil circulation for improved lubrication and sealing
Outline Drawing

MS-301 Outline Drawing

Technical Specifications

MS-301 Technical Specifications

Pumping Speed Curve

MS-301 Speed Curve

MS-631 60 Hz: 680 m3/hour, 400 cfm
50 Hz: 590 m3/hour, 350 cfm
  • Highly robust for challenging industry applications and operating conditions
  • Proven performance in pharmaceuticals, manufacturing, coatings systems, process technology, and metallurgy and heat treatments
  • Low operating ultimate partial pressure of ≤ 8 x 10-2 mbar (≤ 6 x 10-2 Torr) with gas ballast close1d
  • Integrated demister system limits oil exhaust over working pressures, and floating valve for oil recovery
  • Easy to install - small physical footprint
  • Optimized design maximizes cooling air channels and an integrated heat exchanger removes excess heat
Outline Drawing

MS-631 Outline Drawing

Tecnical Specifications

MS-631 Technical Specifications

Pumping Speed Curve

MS-631 Speed Curve

MS-631FL Frameless High-capacity Single stage, oil lubricated rotary vane pump, that can be directly coupled to an Agilent Roots Pump (up to RP-3001 size) without the need of a frame. Ideal for thin-film coatings, vacuum meallurgy, helium leak detection and electron beam welding.
  • Anti-suckback valve prevents system contamination
  • Floating oil recovery valve
  • Carbon composite vanes extend pump life
  • Air cooled
  • Oil recirculation system
  • Minimum footprint
  • Easy to service
Outline Drawing

MS-631FL Outline Drawing

Technical Specifications

MS-631FL Technical Specifications

Pumping Speed Curve

MS-631FL Speed Curve

Ordering Details

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