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Agilent / Varian AX-65 Diffusion Pump

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Agilent / Varian AX-65 Diffusion Pump Agilent / Varian Diffusion Pumps Vacuum Products

The AX-65 diffusion pump is a high-performance, air-cooled pump designed with bench-top analytical instruments in mind. Its vertical finned boiler and high power provide stable pumping and high helium pumping speed. This pump can be ordered with a cold cap or a dense baffle. The pump includes a fluid-level sight glass that indicates the fluid level at all times.

  • High performance specifications means higher, cleaner vacuum levels
  • Fluid-level sight glass provides quick indication of pump fluid status at all times
  • The wide range of available pump configuration and flange combinations optimizes pump performance and fit for your application
  • Compact design makes integration into space-limited equipment easy
  • Full thermal protection guards against all over-temperature conditions
  • “Pump-ready” thermal switch sends a signal when pump is operational
  • Finned, vertical boiler promotes stable pumping, especially of light gases
  • Three-stage fractionating jet with ejector stage purifies pumping fluid, giving higher forepressure tolerance
  • Ordering Details
  • Download AX-65 Diffusion Pump 3D Model

Technical Specifications

Pumping Speed, Operating Range 65 l/sec Air, 90 l/s He and H2
Maximum Throughput 0.19T-l/s (0.25 mbar-l/s) in operating range 0.30T-l/s (0.40 mbar-l/s) @ 0.01 torr  
Compression Ratio 4 x 107 (Air), 2 x 106 (helium)
Operating Range 3 x 10-3 to <5 x 10-8 torr (3.9 x 10-3 to 6.5 x 10-8 mbar)
Maximum Forepressure No load: 0.75 torr (1.00 mbar) Full Load: 0.60 torr (0.78 mbar)
Backstreaming Rate With cold cap: <2 x 10-4 mg/cm2/min With baffle: <2 x 10-5 mg/cm2/min
Recommended Backing Pump ≥1.5 cfm (2.5 m3/hr)
Warmup Time 7 minutes
Cooldown Time 10 minutes
Fluid Charge 30 cc
Electrical Requirements 1 ph, 50/60 Hz, 90/115/165/220 VAC
Pump Power 200/250 watts
Air Cooling 30 cfm

Ordering Information
Description                                             Wt. kg (lbs)                    Part Number
                                                                                                      KF-50          ISO-6
AX-65 with standard cold cap,                    3.6 (8.0)                        L9670301    L9707301
115 V, 250 W
AX-65 with internal baffle,                         3.6 (8.0)                        L9670311    L9707311
115 V, 250 W

Description                                                      Wt. kg (lbs)                       Part Number
Santovac 5 diffusion pump fluid, 40 cc               0.5 (1.0)                            695405001
Internal baffle kit                                             0.9 (2.0)                            R1160065
Centering ring for inlet flange, NW50                 0.5 (1.0)                            KC50SB

Installation and Operation Manual                                                              699901062

Replacement Parts (one heater harness required per pump)

200 W, 115 V heater harness (for use                0.5 (1.0)                           L9994307
with DC-704 and DC-702 or equivalents)
Overtemperature thermal switch                       0.5 (1.0)                           L9964001
(included with each heater harness)
Pump ready thermal switch (optional)               0.5 (1.0)                           L9964002

NOTE • All pumps have NW-16 foreline
• See page 30 for Santovac 5 diffusion pump fluid
• Mounted cooling fan included with each pump
(P/N 661300138)
• Overtemperature thermal switch set to open at 365 °F (182 °C)
• Use 250W heater with polyphenyl ether fluids
(such as Santovac 5). Use 200 W heater for other fluids.

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