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Hexo Industries (M) Sdn Bhd
1-2-9, i-Avenue, Medan Kampung Relau 1, 11900 Bayan Lepas, Penang, Malaysia.
+6011-6528 1088
+604-611 1186
+6012-954 1088
+604-611 1186
+6012-954 1088
+6012-558 2052
+60129541088
Indonesia Branch
Jababeka Bizpark, Blok D/16, Jababeka Innovation Center, Pintu 6, Blok D/16, Cikarang, Bekasi, Jawa Barat 60292, Indonesia.
Singapore Branch
SpectrumSense Solutions
1 Scotts Road, #24-10 Shaw Centre, Singapore 228208.
Agilent / Varian HS-2 Diffusion Pump
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Available in 2 in. and 16 in. through 35 in. sizes, the low-cost HS-series pumps provide high speed, low ultimate pressure, high throughput, high tolerable forepressure, and low backstreaming. The HS-Series diffusion pumps come with full thermal protection and optional quick-cool coils. The 16 in. through 35 in. pumps come with sight glass/fill and drain assemblies, and are available with ASA or ISO flanges.
Features
Features
- High pumping performance in a compact package
- Fractionating jet purifies pumping fluid
- High tolerable forepressure
- Stainless steel jet and pump body
- Standard quick-cool coil
- Finned boiler increases surface area, prolonging pumping fluid life
- Foreline baffle prevents pumping fluid loss into backing system
- Ordering Details
- Download HS-2 Diffusion Pump 3D Model
Specifications
Ordering Information
Description Wt. kg (lbs) Part Number
ASA
With standard cold cap, 120 V 20.0 (9.0) 82906301
With standard cold cap, 240 V 20.0 (9.0) 82906302
Description Wt. kg (lbs) Part Number
Water-cooled baffle with ASA flanges 10.0 (4.5) F9453302
Santovac 5 diffusion pump fluid, 2.5 (1.1) 695405005
500 cc pump fluid, 500 cc
Installation and Operation Manual 699901150
Description Wt. kg (lbs) Part Number
Replacement Parts (one heater required per pump)
350 W, 120 V heater (HS2A) 1.0 (0.5) 647301100
450 W, 120 V heater 1.0 (0.5) 647302125
Heater block (one required per pump) 1.0 (0.5) 82920001
Heater platen (one required per pump) 1.0 (0.5) 82918301
Replacement o-ring kit, (5 Inlet flange 1.0 (0.5) K0377159
o-rings (butyl 2-338))
NOTE
Technical Specifications
| Pumping speed, operating range Pumping speed, AVS 4.1 (1963) | 160 l/s air, 200 l/s He and H2 285 l/s air |
| Maximum Throughput | 0.60 T-l/s (0.80 mbar-l/s) in operating range, 0.70 T-l/s (0.93 mbar-l/s) @ 0.01 Torr |
| Operating Range | 3.7 x 10-3 to < 5 x 10-8 Torr, (4.9 x 10-3 to < 6.5 10-8 mbar) |
| Maximum Forepressure | No load: 0.55 Torr (0.71 mbar) Full load: 0.40 Torr (0.52 mbar) |
| Recommended Backing Pump | ≥ 5 cfm (8.5 m3/hr) |
| Backstreaming Rate, Standard Cold Cap | < 1 x 10-3 mg/cm2/min |
| Warmup Time | 15 minutes |
| Cooldown Time | 10 minutes (with quick cool coil) |
| Fluid Charge | 100 cc |
| Electrical Requirements | 1 ph, 50/60 Hz, 120/240 VAC |
| Pump Power | 450 watts |
| Cooling Water Requirements | 0.1 gpm (20 l/hr) at 60-80 °F (15-26 °C) |
| Water Connections | ⅛ in. FPT |
Description Wt. kg (lbs) Part Number
ASA
With standard cold cap, 120 V 20.0 (9.0) 82906301
With standard cold cap, 240 V 20.0 (9.0) 82906302
Description Wt. kg (lbs) Part Number
Water-cooled baffle with ASA flanges 10.0 (4.5) F9453302
Santovac 5 diffusion pump fluid, 2.5 (1.1) 695405005
500 cc pump fluid, 500 cc
Installation and Operation Manual 699901150
Description Wt. kg (lbs) Part Number
Replacement Parts (one heater required per pump)
350 W, 120 V heater (HS2A) 1.0 (0.5) 647301100
450 W, 120 V heater 1.0 (0.5) 647302125
Heater block (one required per pump) 1.0 (0.5) 82920001
Heater platen (one required per pump) 1.0 (0.5) 82918301
Replacement o-ring kit, (5 Inlet flange 1.0 (0.5) K0377159
o-rings (butyl 2-338))
NOTE
- Inlet flange: nominal 2 in. ASA flange with 6 in. OD
- Foreline flange: 0.84 in. diameter tube