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Agilent / Varian VHS-4 Diffusion Pump

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Agilent / Varian VHS-4 Diffusion Pump Agilent / Varian Diffusion Pumps Vacuum Products


Available in 4-inch, 6-inch, 250-mm, 10-inch, and 400-mm sizes, the VHS series pumps are the fastest and cleanest diffusion pumps of their size available today. The VHS series patented Bulge Contour doubles gas capture and maintains lower pressure. All VHS series pumps have sight glass/fill and drain assemblies for continuous monitoring and easy maintenance of pump fluid. Finned boilers increase surface area, prolonging pumping fluid life. Full thermal protection and quick-cool coils are also standard. The 4-inch, 6-inch, and 10-inch pumps can be ordered with ASA or ISO flanges, standard or extended cold caps, and a variety of voltages.
 

Features

  • Highest pumping speed available
  • Fluid-level sight glass provides a quick indication of pump fluid status at all times
  • Fill and drain assembly for pump oil
  • Fractionating jet purifies pumping fluid
  • High tolerable forepressure
  • Full thermal protection
  • Stainless steel pump body and jet
  • Finned boiler increases surface area, prolonging fluid life
  • Ordering Details
  • Download VHS-4 Diffusion Pump 3D Model
Specifications

Technical Specifications
 
Pumping Speed, Operating Range Pumping Speed, AVS 4.1 (1963) 750 l/s air, 940 l/s He/H2 1,200 l/s Air
Maximum Throughput 1.5 T-l/s (2.0 mbar-l/s) in operating range, 2.5 T-l/s (3.2 mbar-l/s) @ 0.01 torr
Operating Range 2 x 10-3 to <5 x 10-9 torr (2.7 x 10-3 to <6.5 x 10-9 mbar)
Maximum Forepressure No Load: 0.65 torr (0.86 mbar) Full Load: 0.55 torr (0.73 mbar)
Recommended Backing Pump ≥10 cfm (17 m3/hr)
Backstreaming Rate, Standard Cold Cap <5 x 10-4 mg/cm2/min
Warmup Time 10 minutes
Cooldown Time 10 minutes (with quick cool coil)
Fluid Charge 300 cc
Electrical Requirements 1 ph, 50/60 Hz, 120/208/240 VAC
Pump Power 1450 watts
Cooling Water Requirements 0.15 gpm (30 l/hr) at 60-80°F (15-26°C)
Water Connections 1⁄8 in. FPT Tee

Ordering Infomation


Description Weight kg (lbs) Part Number
VHS-4 Pump with standard cold cap
120 V with ASA flanges 25.0 (55.0) 86460301
120 V with ISO flanges 25.0 (55.0) L6256301
120 V with ConFlat Flanges 25.0 (55.0) L6188301
208 V with ASA flanges 25.0 (55.0) 86460306
208 V with ISO flanges 25.0 (55.0) L6256306
208 V with ConFlat Flanges 25.0 (55.0) L6188306
240 V with ASA flanges 25.0 (55.0) 86460302
240 V with ISO flanges 25.0 (55.0) L6256302
240 V with ConFlat Flanges 25.0 (55.0) L6188302
VHS-4 Pump with extended cold cap
120 V with ASA flanges 25.0 (55.0) 86460311
120 V with ISO flanges 25.0 (55.0) L6256311
120 V with ConFlat Flanges 25.0 (55.0) L6188311
208 V with ASA flanges 25.0 (55.0) 86460316
208 V with ISO flanges 25.0 (55.0) L6256316
208 V with ConFlat Flanges 25.0 (55.0) L6188316
240 V with ASA flanges 25.0 (55.0) 86460312
240 V with ISO flanges 25.0 (55.0) L6256312
240 V with ConFlat Flanges 25.0 (55.0) L6188312
Accessories
334 water-cooled baffle with ASA flanges 4.5 (10.0) F8286304
334 water-cooled baffle with ISO flanges 4.5 (10.0) F8286305
334 water-cooled baffle with ConFlat Flanges 4.5 (10.0) F8286306
Centering ring for ISO inlet flange, 160K 0.5 (1.0) IC160SV
Centering ring for ISO foreline flange, KF40 0.2 (0.5) KC40SV
Santovac 5 diffusion pump fluid, 500 cc 1.1 (2.5) 695405005
DC-702 diffusion pump fluid, 500 cc 1.4 (3.0) 695472005
DC-704 diffusion pump fluid, 500 cc 1.4 (3.0) 695474005
DC-705 diffusion pump fluid, 500 cc 1.4 (3.0) 695475005
Instruction manual   699901021
Replacement Parts
Heater, 120 V 1450 W (one required per pump) 0.5 (1.0) 647304205
Heater, 208 V 1450 W (one required per pump) 0.5 (1.0) 647304210
Heater, 240 V 1450 W (one required per pump) 0.5 (1.0) 647304250
Heater clamp (one required per pump) 1.0 (2.0) 88164301
Replacement nickel heater wire 0.5 (1.0) 65617910
O-ring kit, 3 for inlet (butyl, 2-258), 10 for fill and drain (Viton, 2-113) 0.5 (1.0) K0377183
Thermal switch (set at 300 °F/147 °C) 0.5 (1.0) 642906025
Extended cold cap 0.5 (1.0) F6898301
Sight-glass repair kit   L8908301
Basic sight-glass cooling kit   R1523301
Extended sight-glass cooling kit   R1208301


NOTE
  • ASA-flanged pump has 4-in. ASA on inlet, KF40 on foreline.
  • ISO-flanged pump has 60K ISO on inlet, KF40 on foreline.
  • ISO-flanged pump does not include required centering ring.
  • ConFlat-flanged pump has 8-in. CFF on inlet, 2ó-in. CFF on foreline.
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