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Medan Kampung Relau 1,
11900 Bayan Lepas,
Penang, Malaysia.
+604-611 1186
+6012-558 2052
+60125582052
Indonesia Branch
Jababeka Bizpark, Blok D/16, Jababeka Innovation Center, Pintu 6, Blok D/16, Cikarang, Bekasi, Jawa Barat 60292, Indonesia.

Singapore Branch
SpectrumSense Solutions
1 Scotts Road, #24-10 Shaw Centre, Singapore 228208.

Agilent / Varian VHS-6 Diffusion Pump

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Agilent / Varian VHS-6 Diffusion Pump Agilent / Varian Diffusion Pumps Vacuum Products


Available in 4-inch, 6-inch, 250-mm, 10-inch, and 400-mm sizes, the VHS series pumps are the fastest and cleanest diffusion pumps of their size available today. The VHS series patented Bulge Contour doubles gas capture and maintains lower pressure. All VHS series pumps have sight glass/fill and drain assemblies for continuous monitoring and easy maintenance of pump fluid. Finned boilers increase surface area, prolonging pumping fluid life. Full thermal protection and quick-cool coils are also standard. The 4-inch, 6-inch, and 10-inch pumps can be ordered with ASA or ISO flanges, standard or extended cold caps, and a variety of voltages.
 

 


Features
  • Highest pumping speed available.
  • Fluid-level sight glass provides a quick indication of pump fluid status at all times.
  • Fill and drain assembly for pump oil.
  • Fractionating jet purifies pumping fluid.
  • High tolerable forepressure.
  • Full thermal protection.
  • Stainless steel pump body and jet.
  • Finned boiler increases surface area, prolonging pumping fluid life.
  • Ordering Details
  • Download VHS-6 Diffusion Pump 3D Model

Specifications

Technical Specifications

Pumping Speed, Operating Range Pumping Speed, AVS 4.1 (1963) 1,550 l/s Air, 1,930 l/s He/H2 2,400 l/s Air
Maximum Throughput 2.4 T-l/s (3.2 mbar-l/s) in operating range, 3.5 T-l/s (4.5 mbar-l/s) @ 0.01 torr
Operating Range 1.5 x 10-3 to <5 x 10-9 torr (2 x 10-3 to < 6.5 x 10-9 mbar)
Maximum Forepressure No Load: 0.65 torr (0.85 mbar) Full Load: 0.55 torr (0.72 mbar)
Recommended Backing Pump ≥17 cfm (29 m3/hr)
Backstreaming Rate, Standard Cold Cap <5 x 10-4 mg/cm2/min
Warmup Time 10 minutes
Cooldown Time 10 minutes (with quick cool coil)
Fluid Charge 500 cc – exact fluid charge available
Electrical Requirements 1 ph, 50/60 Hz, 120/208/240 VAC
Pump Power 2200 watts
Cooling Water Requirements 0.25 gpm (50 l/hr) at 60-80°F (15-26°C)
Water Connections 1⁄8 in. FPT Tee
Description                               Voltage             Weight kg (lbs)                         Part Number
                                                                                                                      Flange Type
                                                                                                                        ASA                 ISO
VHS-6 Pump 
VHS-6 with standard cold cap    120 V                34.0 (75.0)                   85826301         L6193301
VHS-6 with extended cold cap   120 V                34.0 (75.0)                   85826311         L6193311
VHS-6 with standard cold cap    208 V                34.0 (75.0)                   85826306         L6193306
VHS-6 with extended cold cap   208 V                34.0 (75.0)                   85826316         L6193316
VHS-6 with standard cold cap    240 V                34.0 (75.0)                   85826302         L6193302
VHS-6 with extended cold cap   240 V                34.0 (75.0)                   85826312         L6193312
 
Accessories                                             Page                 Weight kg (lbs)             Part Number
Water-cooled baffle with ASA flanges     31                    7.0 (15.0)                     F8277306
Water-cooled baffle with ISO flanges     31                    7.0 (15.0)                     F8277307
Santovac 5 diffusion pump fluid,             30                    1.1 (2.5)                       695405005
500 cc (exact pump charge) 
 
Centering ring for ISO inlet flange, 200K                       0.5 (1.0)                       IC200SV
Centering ring for ISO foreline flange, KF50                  0.2 (0.5)                       KC50SV
Installation and Operation Manual                                                                      699901022
 
Replacement Parts (one heater required per pump)
2200 W, 120 V heater                                                     0.5 (1.0)                       647306125
2200 W, 208 V heater                                                     0.5 (1.0)                       647306175
2200 W, 240 V heater                                                     0.5 (1.0)                       647306225
Heater clamping assembly (includes clamping plate, cover plate, insulator)   86643301
Heater cover plate (one required per pump)                1.0 (2.0)                       86088001
Heater insulator (one required per pump)                    0.2 (0.5)                       86087001
Heater clamping plate (one required per pump)           0.5 (1.0)                      86086301
VHS-6/250 heater wire, 10 AWG,                                  0.5 (2.0)                       X3901-68002
36 inches (3 per pump required) 
 
Replacement o-ring kit (kit contains:                             0.5 (1.0)                       K0377184
3 inlet flange o-rings (butyl 2-267), 
 
3 foreline flange o-rings (butyl 2-332), sight glass o-ring and gasket,
10 fill and drain o-rings (Viton 2-113))
Thermal switch (set at 300 °F – 147 °C)                        0.5 (1.0)                       642906025
 
Extended cold cap 31                                                       0.5 (1.0)                       F6455001
 
NOTE 
  • Inlet flange 6 in. ASA , foreline flange 1.5 in. ASA
  • Inlet flange ISO 200K, foreline flange ISO KF50
  • Pumps with ISO flanges do not include required centering rings
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