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Indonesia Branch
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Singapore Branch
SpectrumSense Solutions
1 Scotts Road, #24-10 Shaw Centre, Singapore 228208.

Agilent / Varian VHS-400 Diffusion Pump

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Agilent / Varian VHS-400 Diffusion Pump Agilent / Varian Diffusion Pumps Vacuum Products

Available in 4-inch, 6-inch, 250-mm, 10-inch, and 400-mm sizes, the VHS series pumps are the fastest and cleanest diffusion pumps of their size available today. The VHS series patented Bulge Contour doubles gas capture and maintains lower pressure. All VHS series pumps have sight glass/fill and drain assemblies for continuous monitoring and easy maintenance of pump fluid. Finned boilers increase surface area, prolonging pumping fluid life. Full thermal protection and quick-cool coils are also standard. The 4-inch, 6-inch, and 10-inch pumps can be ordered with ASA or ISO flanges, standard or extended cold caps, and a variety of voltages.

  • Highest pumping speed available for its height.
  • Fluid-level sight glass provides quick indication of pump fluid status at all times.
  • Fill and drain assembly for pump oil.
  • High throughput, 5100-watt version available.
  • Four-stage fractionating jet purifies pumping fluid.
  • High tolerable forepressure.
  • Full thermal protection.
  • Finned boiler increases surface area, prolonging pumping fluid life.
  • Quick cool coil is standard.
  • Foreline baffle prevents fluid loss into backing system.
  • Ordering Details
  • Download VHS-400 Diffusion Pump 3D Model

Technical Specifications
Pumping Speed, Operating Range Pumping Speed, AVS 4.1 (1963) 4,500 l/s Air, 5,625 l/s He/H2 8,000 l/s Air
Maximum Throughput 6.3 T-l/s (8.4 mbar l/s) in operating range 7.5 T-l/s (10.0 mbar l/s) @ 0.01 torr
Operating Range 1.4 x 10-3 to <5 x 10-9 torr (1.9 x 10-3 to <6.5 x 10-9 mbar)
Maximum Forepressure No Load: 0.65 torr (0.85 mbar) Full Load: 0.55 torr (0.72 mbar)
Recommended Backing Pump ≥30 cfm (51 m3/hr)
Backstreaming Rate, Standard Cold Cap <1.0 x 10-3 mg/cm2/min
Warmup Time 15 minutes
Cooldown Time 25 minutes
Fluid Charge 1,000 cc
Electrical Requirements 3 ph, 50/60 Hz, 208/380/480 VAC
Pump Power 4400 watts
Cooling Water Requirements 0.40 gpm (80 l/hr)
Water Connections
  • 1⁄8 in. FPT Tee

Ordering Information

Description                                                         Voltage                                Weight kg (lbs)                                 Part Number
                                                                                                                                                                                 Flange Type
VHS-400 Pump                                                                                                                                                        ASA        ISO
VHS-400 with standard cold cap                         208V                                   75.0 (180.0)                              K4816307    L9767307
VHS-400 with standard cold cap                         380 V                                  75.0 (180.0)                              K4816326    L9767326
Accessories Page                                                           Weight kg (lbs)                                    Part Number
Centering ring for ISO Inlet flange, 400K                         0.5 (1.0)                                               IC400SV
Centering ring for ISO foreline flange, 63K                      0.5 (1.0)                                                IC063SV
Installation and Operation Manual                                                                                                699901023
Replacement Parts (two heaters required per pump)
2200 W, 208 V heater                                                     1.0 (0.5)                                                647310140
2200 W, 240 V heater                                                     1.0 (0.5)                                                647310150
2550 W, 380 V heater                                                     1.0 (0.5)                                                647310165
2550 W, 480 V heater                                                     1.0 (0.5)                                                647310175
Heater crush plate                                                           2.0 (1.0)                                                K7667001
(one required per pump; replace
when either heater is replaced)
Heater clamping plate                                                    1.0 (0.5)                                                R2667301
(one required per pump)
VHS-10/400 heater wire, 10 AWG,                                1.0 (0.4)                                                X3901-68003
42 inches (3 per pump required)
Replacement o-ring kit (kit contains:                              1.0 (0.5)                                                K0377189
 1 inlet flange o-ring (butyl 2-385),
foreline flange o-ring (butyl 2-338), sight glass o-ring and gasket,
10 fill and drain o-rings (Viton 2-113))
Thermal switch (set at 300 °F – 147 °C)                        1.0 (0.5)                                                642906025
• Inlet flange ISO 400K, foreline flange ISO 63-K.
• Inlet flange non-standard ASA, foreline flange 2 in. ASA.
• Pumps with ASA flanges include O-Rings for inlet and foreline flanges
• Pumps with ISO flanges do not include centering rings required for inlet and foreline flanges.

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