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Agilent / Varian HS-20 Diffusion Pump

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Agilent / Varian HS-20 Diffusion Pump Agilent / Varian Diffusion Pumps Vacuum Products

Agilent / Varian Large Diffusion Pumps

HS-20 Diffusion Pump


The Agilent HS-20 Oil Diffusion Pump is a pump with a high throughput and high pumping speed of 10,000 L/s. With its fully optimized vapor jet, robust boiler design and thermal protection switches, the pump will run without any maintenance for many years. It is available with 20 in. ASA or ISO 630K inlet flange.

This pump is a perfect fit for industrial applications such as vacuum furnace, heat treatment, metallizing, and coating processes for optical lenses, electronics, and protective film layers.

  • Five-stage fractionating jet purifies pumping fluid and assures low base pressure
  • High tolerable forepressure
  • Full thermal protection
  • Fluid-level sight glass provides quick indication of pump fluid status at all times
  • Fill and drain assembly for pump fluid
  • Standard gauge port (NW-25) below inlet flange included
  • Foreline baffle prevents loss of fluid into backing pump system
  • Optional halo baffle reduces backstreaming without adding height

Backstreaming Rate
  • 1.5 x 10-3 mg/cm²/min
Cooldown Time
  • 45 min
Electrical Requirements
  • 3 ph
  • 50/60 Hz
  • 240/415/480 V
Fluid Charge
  • 18927 CC
Fluid Type
  • Oil
Input Voltage
  • 240, 415, 480 V
Maximum Forepressure - Full Load
  • 0.55 Torr
  • 0.72 mbar
Maximum Forepressure - No Load
  • 0.65 Torr
  • 0.85 mbar
Maximum Throughput
  • 12.5 T-L/s (16.7 mbar-L/s)
Operating Range
  • 1.3 x 10-3 to 5 x 10-8 Torr
  • 1.7 x 10-3 to 6.5 x 10-8 mbar
Pump Power
  • 12000 W
Pump Weight
  • 600 lbs
  • 272.2 kg
Pumping Speed - Air
  • 10000 L/s
Pumping Speed - Air, via AVS 4.1 (1963)
  • 17500 L/s
Pumping Speed - He/H2
  • 12500 L/s
Recommended Backing Pump
  • ≥ 100 cfm (170 m3/hr)
Warmup Time
  • 45 min
Water Connections
  • 1/4 inch FPT
Water Cooling - Temperature Requirement
  • 60-80 °F
  • 15-26 °C
Water Cooling Flow Requirement
  • 1.5 gpm
  • 300 L/hr


Diffusion Pumps

Catalog of Agilent HS and VHS Diffusion Pumps for high vacuum. Complete model listing with specifications, drawings, pictures, ordering information and application

Technical Overviews

Maintenance and Troubleshooting of Oil Diffusion Pumps

This solution note tells how diffusion pumps work, how to operate diffusion pumps, how to maintain and troubleshoot issues.

Supplemental Information
User Manuals

High Throughput Diffusion Pumps user manual

Instructions for use and technical specifications for High Throughput Diffusion Pumps for use with HS-16, HS-20, HS-32 and NHS-35


Vacuum Technology Application & Training

Let Agilent vacuum experts help you discover better solutions for your application or train you on vacuum and leak detection concepts and theory. Our Application Engineers combine expertise in vacuum systems and design with experience in industry and research environments. They can assist you in all aspects from theory and design to materials science and apply it to ...

Diffusion Pump Repair & Spare Parts

Find the right heaters, O-rings, thermal switches, oil, sight glass, or other spare parts or consumables for your Agilent or Varian diffusion pump to keep its performance at peak levels. Only parts from the original equipment manufacturer ensure fit, form, and function for your diffusion pump. Common spare parts and consumables are stocked for fast delivery and can be ...

Vacuum Product Spare Parts & Consumables

Get genuine original manufacturer parts for your Agilent or Varian vacuum equipment. Including parts for your leak detector, diffusion pump, scroll pump, ion pump, rotary vane pump, and XGS gauge controller. Commonly needed components include pump heaters, pump oil, maintenance kits, tip seals, filaments, thermostats, O-rings, and spectrometers.|Use the online chat ...


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