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+6011-6528 1088
+604-611 1186
+6012-954 1088
+6012-558 2052

Indonesia Branch
Jababeka Bizpark, Blok D/16, Jababeka Innovation Center, Pintu 6, Blok D/16, Cikarang, Bekasi, Jawa Barat 60292, Indonesia.

Singapore Branch
SpectrumSense Solutions
1 Scotts Road, #24-10 Shaw Centre, Singapore 228208.

Agilent / Varian HS-32 Diffusion Pump

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Agilent / Varian HS-32 Diffusion Pump Agilent / Varian Diffusion Pumps Vacuum Products

Available in 2 in. and 16 in. through 35 in. sizes, the low-cost HS-series pumps provide high speed, low ultimate pressure, high throughput, high tolerable forepressure, and low backstreaming. The HS-Series diffusion pumps come with full thermal protection and optional quick-cool coils. The 16 in. through 35 in. pumps come with sight glass/fill and drain assemblies, and are available with ASA or ISO flanges.

  • Five-stage stainless steel fractionating jet purifies pumping fluid.
  • Full thermal protection.
  • Fluid-level sight glass provides quick indication of pump fluid level at all times.
  • Fill and drain assembly for pump oil.
  • Optional halo baffle cold cap reduces backstreaming without adding height.
  • Standard gauge port (NW-25) below inlet flange included.
  • Optional quick cool coil.
  • Please note that this item is controlled for export by the Nuclear Suppliers Group. Accordingly, you may be required to obtain an export license from the U. S. Department of Commerce prior to exporting this pump from the United States. Please consult the U. S. Export Administration Regulations, ECCN 2B231, for further guidance.
  • Ordering Details
  • Download HS-32 Diffusion Pump 3D Model


Technical Specifications

Pumping Speed, Operating Range
Pumping Speed, AVS 4.1 (1963)
17,300 l/s Air, 21,625 l/s He and H2
32,000 l/s Air
Maximum Throughput 30 T-l/s (40 mbar l/s) in operating range, 35 T-l/s (45 mbar-l/s) @ 0.01 torr
Operating Range 1.7 x 10-3 to <5 x 10-8 torr (2.3 x 10-3 to <6.5 x 10-8 mbar)
Maximum Forepressure No Load: 0.50 torr (0.65 mbar)
Full Load: 0.35 torr (0.45 mbar)
Recommended Backing Pump ɛ300 cfm (510 m3/hr)
Backstreaming Rate, Standard Cold Cap <7 x 10-4 mg/cm2/min
Warmup Time 60 minutes
Cooldown Time 180 minutes
Fluid Charge 3 U.S. gallons (11.3 liters)
Electrical Requirements 3 ph, 50/60 Hz, 240/415/480 VAC
Pump Power 24,000 watts
Cooling Water Requirements 4 gpm (800 l/hr) at 60-80°F (15-26°C)
Water Connections 3⁄8 in. FPT Tee
Recommended Fluid DC-704

Ordering Information
Description                            Wt. kg (lbs)                                             Part Number
HS-32 Pump                                                                                         ASA        ISO
HS-32 with standard            612 (1,350)                                           76134308   L5923308
cold cap, 240 V
HS-32 with halo baffle,
240 V                                   612 (1,350)                                           76134318   L5923318
Accessories                                            Wt. kg (lbs)                                     Part Number
Water-cooled halo baffle                           16 (35)                                            K1856332
Quick cool coil – must be installed Factory
in the factory Special
Centering ring for ISO foreline                 0.5 (1.0)                                           IC200SV
flange, 200K
Installation and Operation Manual                                                                  699901140
Description                                           Wt. kg (lbs)                                      Part Number
Replacement Parts (six heaters required per pump)
Heater*, 4000 W,                                    0.5 (1.0)                                            647332010
240 V/415 V/
480 V with leads
Heater*, 4000 W,                                    0.5 (1.0)                                            647332075
240 V/415 V/
480 V no leads – used on pumps
built before May ‘90
*One heater consists of 2-120V heaters, right and left
Heater crush plate 0.5 (1.0) K7246001
(replace one with each new heater)
Heater insulator
(one required per pump)                       0.5 (1.0)                                            75792001
Heater clamping plate
(six required per pump)                        4 (8)                                                   K7247001
HS-32/35 heater wire,
10 AWG, 196 inches                             1.0 (0.4)                                            X3900-68003
(2 per heater required)
Replacement o-ring kit for                     0.5 (1.0)                                            K0377167
ASA pumps
(kit contains: 1 inlet flange o-ring
(buna 45390001), 1 foreline flange
o-ring (butyl 2-443), sight glass o-ring
and gasket, 8 fill and drain o-rings (Viton 2-213)
Sight glass service kit                          1.5 (3.0)                                            F6097301
(pumps built before Oct. ‘95)
Sight glass service kit                          1.5 (3.0)                                            L9223001
(pumps built after Oct. ‘95)
ISO inlet flange o-ring                          0.5 (1.0)                                            78536002

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