This 800 L/s turbomolecular pump with ISO 200K, 250K and CFF 10 in inlet flanges, is perfectly suited for a wide range of applications, including research and development, UHV systems, nuclear research, ion implanters, surface analysis, electron microscopy, and cryogenics.
Agilent also provides TwisTorr FS-OS turbo pumps, designed for academia, research, and other applications that require long-term operation in demanding conditions.
The TwisTorr 804 FS is available with onboard or rack controllers.
View the image gallery to learn more about the TwisTorr 804 FS Turbo Pump.Features
- Innovative TwisTorr technology - high compression ratio for light gases provides high performance and minimal system footprint.
- High foreline tolerance - permits use of smaller backing pump, thereby reducing system cost and size.
- Agilent Floating Suspension - low vibration and acoustical noise as well as optimal bearing working conditions extend operating life to optimize cost-of-ownership, minimize system downtime, and assure stable performance over time.
- Unique bearing and dry lubrication - maintenance free, oil free; allows installation in any orientation.
- “Three dimensional” pump control software provides maximum flexibility, speed, and simplicity - for the best throughput and compression performance according to the operating conditions of the pump.
- Typical Turbo Pump Applications
- Download TwisTorr 804 FS 3D Models
| Pumping speed: | ISO200K-F |
ISO250K-F
|
CFF10 |
|
N2 He H2 Ar |
720 L/s 660 L/s 485 L/s 690 L/s |
||
| Max Gas Throughput(*) |
Air Cooling (25°C Air temperature) |
Water Cooling (15°C Water temperature / 25°C room temperature) |
|
| N2 |
4.3 mbarL/s 255 SCCM |
6.1 mbar L/s 367 SCCM |
|
| He |
7.9 mbar L/s 467 SCCM |
10.4 mbar L/s 615 SCCM |
|
| Ar |
1.5 mbar L/s 89 SCCM |
3.3 mbar L/s 195 SCCM |
|
| (*) Backing pump 11.6 m3/hr | |||
| Compression ratio and foreline tolerance* | |||
|
N2 He H2 Ar |
>1E+11 2E+08 3E+06 1E+11 |
10 mbar 10 mbar 4 mbar 8.5 mbar |
|
| (*) Foreline Tolerance defined as the pressure at which the turbopump still produce a compression of 100 and estimated in water cooling mode | |||
| Base pressure with recomm. forepump |
< 1 x 10-10 mbar (< 1 x 10-10 Torr) |
||
| Inlet flange |
ISO 200K, ISO 200F, ISO 250K, ISO 250F, CFF 10” |
||
| Foreline flange | NW25 or NW40 | ||
| Recommended forepump |
DS302 IDP10 IDP15 |
||
| Operating position | Any | ||
| Oper. ambient temperature | +5 °C to +35 °C | ||
| Lubricant | Permanent grease lubrication | ||
| Cooling requirements | |||
| Air cooling | Air temperature from +5°C to 35°C | ||
| Water cooling |
Water temperature from +15°C to +25°C Water flow min. 100L/h |
||
|
Noise Pressure Level (at 1m at full speed) |
43dB(A) |
Pumps Configuration Options
TwisTorr 804 FS ISO200K KF25 air cooling X3511-64007
TwisTorr 804 FS ISO200K KF40 air cooling X3511-64008
TwisTorr 804 FS ISO200F KF25 air cooling X3511-64009
TwisTorr 804 FS ISO200F KF40 air cooling X3511-64010
TwisTorr 804 FS CFF10'' KF25 air cooling X3511-64011
TwisTorr 804 FS CFF10'' KF40 air cooling X3511-64012
TwisTorr 804 FS ISO250K KF40 air cooling X3511-64013
TwisTorr 804 FS ISO250F KF40 air cooling X3511-64014
TwisTorr 804 FS ISO200K KF25 water cooling X3511-64022
TwisTorr 804 FS ISO200K KF40 water cooling X3511-64023
TwisTorr 804 FS ISO200F KF25 water cooling X3511-64024
TwisTorr 804 FS ISO200F KF40 water cooling X3511-64025
TwisTorr 804 FS CFF10'' KF25 water cooling X3511-64026
TwisTorr 804 FS CFF10'' KF40 water cooling X3511-64027
TwisTorr 804 FS ISO250K KF40 water cooling X3511-64028
TwisTorr 804 FS ISO250F KF40 water cooling X3511-64029
Controllers Part Numbers
TwisTorr Medium-TMP Rack Controller X3501-64016
TwisTorr Medium-TMP on board Controller X3512-64016
Inquiry - Agilent TwisTorr 804 FS