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Varian, Ion Pump

Ion Pumps
Large VacIon Plus Pumps (150 to 1000 L/s for nitrogen)


The large VacIon Plus pumps range from pumping speeds of 150 L/s to 1000 L/s for nitrogen. These pumps are available with Diode, Noble Diode, and StarCell elements.

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Ion Pumps
Ion CombiNEG Pumps


Ion CombiNEG pumps combine the state-of-the-art Agilent (formerly Varian) ion pump technology with the SAES Non-Evaporable Getter (NEG) sintered cartridge.

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Ion Pumps
Combination VacIon Plus Pumps/Titanium Sublimation Pumps


The VacIon Plus Combination Pumps integrate titanium sublimation pumping to achieve ultra-high vacuum. The Titanium Sublimation Pump (TSP) creates extra high pumping speed for getterable gases while the ion pump handles the non-getterable gases such as argon and methane.

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Ion Pumps
Medium VacIon Plus Pumps (20 to 75 L/s for nitrogen)

The medium VacIon Plus pumps range from pumping speeds of 20 to 75 L/s for nitrogen. These ion pumps are available with Diode, Noble Diode, and StarCell elements.

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Ion Pumps
Miniature and Small VacIon Pumps (0,4 to 10 L/s for nitrogen)

The Miniature Vaclon pump is a diode configuration and provides approximately 0.4 l/s of nitrogen pumping speed.

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Ion Pumps
Ion Pump Controllers


Agilent provides a full range of ion pump controllers, including the single channel control unit IPCMini, the multichannel control unit 4 UHV, and the TSP control unit for titanium sublimation pumps.

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Agilent / Varian Ion Pump Accessories

Cables for Ion Pumps and Controllers

Agilent high voltage ion pump cables connect ion pumps from 0.


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Agilent / Varian Ion Pump Accessories

Adapters & Feedthroughs for Ion Pumps

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