Hexo Industries (M) Sdn Bhd
1-2-9, i-Avenue, Medan Kampung Relau 1, 11900 Bayan Lepas, Penang, Malaysia.
+6011-6528 1088
+604-611 1186
+6012-954 1088
+6012-558 2052
sales@hexoind.com
 +60125582052
  +60129541088

Indonesia Branch
Jababeka Bizpark, Blok D/16, Jababeka Innovation Center, Pintu 6, Blok D/16, Cikarang, Bekasi, Jawa Barat 60292, Indonesia.

Singapore Branch
SpectrumSense Solutions
1 Scotts Road, #24-10 Shaw Centre, Singapore 228208.

Agilent / Varian HS-16 Diffusion Pump

AllVacuum ProductsDiffusion PumpsAgilent / Varian

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Agilent / Varian HS-16 Diffusion Pump Agilent / Varian Diffusion Pumps Vacuum Products


Available in 2 in. and 16 in. through 35 in. sizes, the low-cost HS-series pumps provide high speed, low ultimate pressure, high throughput, high tolerable forepressure, and low backstreaming. The HS-Series diffusion pumps come with full thermal protection and optional quick-cool coils. The 16 in. through 35 in. pumps come with sight glass/fill and drain assemblies, and are available with ASA or ISO flanges.


Features
  • Five-stage fractionating jet purifies pumping fluid
  • High throughput, 9600-watt version available
  • High tolerable forepressure
  • Full thermal protection
  • Fill and drain assembly for pump oil
  • Fluid-level sight glass provides quick indication of pump fluid status at all times
  • Standard gauge port (NW-25) below inlet flange included
  • Foreline baffle prevents loss of fluid into backing pump system
  • Optional halo baffle reduces backstreaming without adding height
  • Optional quick cool coil
  • Ordering Details

Specifications

Technical Specifications

Pumping speed, operating range 6,000 l/s air, 7,500 l/s He and H2
Pumping speed*, AVS 4.1(1963) 10,000 l/s air
Maximum throughput 8,100 W – 9.5 T-l/s (12.7 mbar l/s) in operating range13.5 T-l/s (18.0 mbar-l/s) @ 0.01 Torr
9,600 W –12.0 T-l/s (16 mbar l/s) in operating range 11.5 T-l/s (15.3 mbar-l/s) @ 0.01 Torr
Operating range 2 x 10-3 to <5 x 10-8 Torr at 9,600 W (1.3 x 10-3 to <6.5 x 10-8 mbar)
Maximum forepressure No load – 0.65 Torr (0.85 mbar), Full Load – 0.55 Torr (0.72 mbar)
Pump power 8100/9600 watts
Recommended backing pump ≥ 80 cfm (136 m3/hr)
Backstreaming rate**, standard cold cap <1.5 x 10-3 mg/cm2/min
Warmup time 30 minutes
Cooldown time 48 minutes (30 minutes with optional quick cool coil)
Fluid charge 3 quarts (2.8 liters)
Electrical requirements 3 ph, 50/60 Hz, 240/415/480 VAC
Cooling water requirements 1.5 gpm (300 l/hr) at 60-80 °F (15-26 °C)
Water connections 1⁄4 in. FPT Tee
Recommended fluid DC-704 (see page 30 of catalog)


Ordering Information

Description                                           Voltage                   Weight kg (lbs)                              Part Number
                                                                                                                                                       Flange Type
HS-16 Pump                                                                                                                                ASA         ISO


HS-16 with standard cold cap             240 V                      218.0 (480.0)                        79292308        L5921308
HS-16 with halo baffle                          240 V                      218.0 (480.0)                        79292318        L5921318
HS-16 with standard cold cap             415 V                      218.0 (480.0)                        79292326        L5921326
HS-16 with halo baffle                          415 V                      218.0 (480.0)                        79292336        L5921336
HS-16 with standard cold cap             480 V                      218.0 (480.0)                        79292309        L5921309
HS-16 with halo baffle                          480 V                      218.0 (480.0)                        79292319        L5921319
 
Accessories                                                      Weight kg (lbs)                                                        Part Number
Water-cooled halo baffle                                   31 9.0 (20.0)                                                            K0143316
Centering ring for ISO foreline flange,             0.5 (1.0)                                                                   IC100SV
100K Quick cool coil – must be installed in the factory Factory Special
Installation and Operation Manual                                                                                                 699901140
 
Replacement Parts (three heaters required per pump)
 
2700 W, 240 V/415 V with leads                       0.5 (1.0)                                                                  647316020
2700 W, 480 V with leads                                  0.5 (1.0)                                                                 647316030
2700 W, 240 V/415 V no leads
– used on pumps built before May ‘90            0.5 (1.0)                                                                 647316035
2700 W, 480 V no leads
– used on pumps built before May ‘90            0.5 (1.0)                                                                 647316045
3200 W, 240 V/415 V with leads                        0.5 (1.0)                                                                 647316023
3200 W, 480 V with leads                                  0.5 (1.0)                                                                 647316033
Heater crush plate
(replace one with each new heater)                0.5 (1.0)                                                                 K4919001
Heater insulator
(three required per pump)                                0.5 (1.0)                                                                 79309001
Heater clamping plate
(three required per pump)                                4.0 (8.0)                                                                 K4917001
HS-16/20/Dalton heater wire, 10 AWG,
120 inches (2 per heater required)                  1.0 (0.4)                                                                 X3900-68000
Replacement o-ring kit for ASA pumps
(kit contains: 1 inlet flange o-ring (buna         0.5 (1.0)                                                                 K0377164
48214001), 1 foreline flange o-ring (buna 2-348), sight glass o-ring and gasket,
8 fill and drain o-rings (Viton 2-213))
Sight glass service kit
(pumps built before Oct. ’95)                            1.5 (3.0)                                                                 F6097301
Upper (water) thermal switch
(set at 185 °F/85 °C)                                            0.5 (1.0)                                                                 K9050001
Lower (boiler) thermal switch
(set at 390 °F/199 °C)                                          0.5 (1.0)                                                                 K9050002
Cold cap gasket/grommet (kit of 4)                  0.5 (1.0)                                                                 L8839301
Cold cap nut and follower (2 each)                  0.5 (1.0)                                                                 L8840301
NOTE
• Inlet flange 16 in. ASA, foreline flange 3 in. ASA
• Inlet flange ISO 500K, foreline flange ISO 100K
• Not recommended for use with Santovac 5
• Pumps with ASA flanges include o-rings for inlet and foreline flanges
• Pumps with ISO flanges do not include centering rings required for foreline and inlet flanges
 

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1-2-9, i-Avenue, Medan Kampung Relau 1, 11900 Bayan Lepas, Penang, Malaysia.

+6011-6528 1088
+604-611 1186
+6012-954 1088

+6012-558 2052

sales@hexoind.com

+60125582052
+60129541088

https://www.hexoind.com

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